Home / Supplemental Notes


Supplemental notes for MEMS students and researchers. Most of them pertain to design, models, and mathematical formula.

Note 1: Dynamics for MEMS in a nutshell 

This is a very comprehensive and thorough review of second order system dynamics meant for MEMS engineers. It is an original contribution that was contributed by Chang Liu. This note reviews the methods for building governing equations, methods for solving governing equations, and reviews of most common cases.  The cases including both free systems (no forcing), forced systems with step functions, and forced systems with sinusoidal input.  It is meant as a comprehensive and accurate resource for MEMS engineers. It also reviews equivalency between a mechanical m-k-s system and an electrical system.

Note 2: The graphic history of MEMS

This is a figure summarizing major events and timeline of MEMS technology development. This file graphically depicts major milestones in the field of MEMS.

high resolution image  pdf  

Note 3: A managable list of commonly encountered MEMS materials, commonly encountered process steps, and reaction table

MEMS uses many materials and processes. If there are m materials and n processes, the reactivity table would be the size of mxn. Further, there are many fine variations of processes (power, pressure, treatment details) and materials (quality, film deposition methods, etc). This table is not easily managed by begining students.  Here are three tables, one for commonly encountered MEMS materials, one for commonly encountered process steps (including deposition and etching), and one summarizing basic reaction among these materials and processes.

Note 4: A brief history of MEMS market development (first posted December 1, 2011)

In this note, I provide a historical compilation of MEMS market data. I compare such data historically, with other divisions (such as Hewlett Packard), and with other companies (such as Google). I hope you enjoy reading this.

Other notes that will come in the future include:

Condenser microphone design in a nutshell