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This page provides a comprehensive and updated set of links to MEMS related utilities, interview and historical recounts, companies, emerging companies, research organizations, and products. For some companies, you can find most updated news items pertaining to them.
Large companies or companies with many products
Texas Instruments Company MEMS
division History
of DLP development lightCrafter
Hewlett Packard ink jet printers Technology an
HP inkjet cartridge teardown pdf archive
General Electric Global Research Corporate
link Micro/Nano
Sector (include link taken inside the cleanroom) History
Honeywell Corporate Microelectronics
and sensors
Robert Bosch (~$450M/year, 2008) Company
Research and
Technology Center Sensors
division history geomagnetic
sensors
Sensonor Technologies (Norway) Link Motion,
pressure and accelerometers since 1965
ASM Sensor (Chicago area)
Freescale Semiconductors Company Sensor
division Xtrinsic
pressure sensor
NXP Semiconductors (Nasdaq: NXPI), a Eindhoven, Netherland based european
company with $3.9B revenue, Company sensor
division ppt intro
Kulite - Leader in pressure transducer technology Link
Technology
TRW Automotive Electronics Group Link Wikipedia
and tech milestones
Sensirion AG, Switzerland, specializes in humidity sensor, pressure sensor, and
flow sensor Link ultra-low
flow rate sensor
PCB Piezotronics, Link
Measurement Specialities (Nasdaq:MEAS) Link
Silicon Microstructures Inc (SMI), Link
Murata manufacturing Co., Ltd., Link
Sanmina-SCI, electronic and mechanical products, Link
FOGALEnanotech, French company with products in capacitive, optical, and
ultrasound sensors, Link
Companies primarily in the motion
sensing space
Analog Devices (~$100M/year)
Company MEMS
division Analog
Dialog, a forum for exchange Article
on Gyro and Motion
STMicroelectronics Company
Wikipedia Description
MEMS/sensor
division News
3/25/2011
InvenSense Company InvenSense
Youtube Channel Planning
IPO for $75M
Colibrys Link News
MEMSIC, accelerometers and wireless motes,
IMUs, and vertical gyro $18M
sales in Q32011 Home
Endevco, accelerometers, Link pdf
reference library about motion sensors
Systron Donner Inertial Division (SDI) Link
Bosch (see above)
ROHM Kionix, a company started by Cornell faculty in 1993 . Acquired by ROHM on
Nov 13, 2009. Link Link
to parent company ROHM 3/25/2011
Denso, Japanese automotive parts
(~$200M/year, 2008) Link
Sensata Technologies, (NYSE: ST)Multinational automotive safety
products, started in Germany formerly TI Sensors (~ $140M/year, 2008) Link Investor
Info History
Infineon Technologies, A German company with global imprint on many challenging areas
(~$130M/year, 2008). Spun off Siemens in 1999. Link Wikipedia
Schneider Electric, a French Company, a
global expert on energy management (~$100M/year, 2008) Link
Company
History Sensors
Wiki
VTI, a Finland company focusing on automotive and sensors (~$80M/year,
2008) Link Asian
Distributor QuadRep 3/17/2011
3/24/2011 acquired
by Murata on 10/11/2011
Panasonic Industrial Works, supplier of automation,
electronics, and lighting (~$70M/year, 2008) Link
Delphi, leading global supplier of
electronics and technologies for automobiles (~ $70M/year, 2008) Link
Sumitomo Precision Products, Silicon Sensing Systems Link MEMS
division MEMS
division 2
SensorDynamics, Austria, wireless motion sensor products, acquired by Maxim
(Nasdaq: MXIM) on July 18, 2011 for $160M, Link
Sitronix, Taiwan. Link
Epson Toyocom, Japan, QMEMS process Epson Electronics America (EEA) IMU
sensor Link Epson
Microsystems Epson Electronics
America
Pirelli Cyber Tyer Link
Moog Crossbow. Crossbow's 2010 revenue was 13 million dollars. It was acquired
by Moog (Nasdaq: MOG.A) in July
2011. New link
Qualtre, headquartered in Marlborough, MA, USA, venture backed SAW motion
sensor, founded in 2008, Link
Silicon Designs, military rugged capacitive sensors, Issaquah, WA, founded in
1983, Link
DyTran Instruments, Inc, Link
Acacia MEMTech, (Nasdaq:ACTG) Acacia
Link
VectorNav Technologies, LLC, embedded navigation solutions Link
Goodrich, a Fortune 500 global supplier of system and services, Link
News related to
IMU shipment 2012
development in Minnesota
Biospace
Cephied bioassay Home technology
news
Abbott i-Stat wholeblood analysis Site
CardioMEMS, a startup from Georgia Tech Company
Article
background
ISSYS Integrated Sensing Systems Company
Omron Micro Device division, Pressure sensors, thermal
sensors for human presence, company industrial
automation sensors
History
Microprobe, a company specializing in neural implant devices,also
entering probe card market to compete with Formfactor, Link
Microvisk technologies, developer of handheld system to monitor the blood
clotting status of patients Company
Fraunhofer IPMS, MEMS laser microscope, Link
Axion Biosystems, multielectrode recording, Link
Experimetria, pre-clinical trial research company, Link
Acoustic sensor space Analysis
2
Knowles electronics, acoustic sensors, gaming
joysticks for portable devices, Home MEMS
Akustica (purchased by Bosch in 2010) Link
to news
Sonion Link News
Analog Devices
Wolfson Microelectronics (Edinburgh, UK) Link
Infineon
Suzhou MEMSensing Microsystems Link
Shenzhen AAC Acoustic Technologies Link
Shandong Weifang Goer Acoustic Technology Link
Companies and technologies related to
printers, print heads, e-paper, display, and optics:
Wikipedia
link
Qualcomm Mirasol display Group page
Video
Kyobo, Korea's
largest bookseller, uses Mirasol-display technology, Nov 22, 2011 Koobe
collaboration Bambook
Pixtronix Link Story Collaborating
with Chimei Innolux
Pixel Qi Link
is a spin off of One Laptop Per Child
Plastic Logic Link
manufacturers polymer-based organic electronics
E-Ink Corporation Link
Supplier of low power display to Amazon Kindle
Hewlett Packard Flexible Display technology Link
Liquivista, electrowetting display Link
Organic LED Display Taiwan
ITRI
Silicon Light Machine and Grating Light Valve (GLV) technology SLM
GLV
Keynote photonics, a developer of solutions, tools and processors for photonics
applications using MEMS Company
FLIR, leader in thermal imaging Link
Sofradir, a B2B company headquarterd in France (since 1986). It develops
infrared (IR) and wave detectors for military applications. Link
ULIS, infrared sensor manufacturer, Link
Pyreos, Edinburgh, Infrared technology, Link
DiCon Fiberoptics and MEMS, secure switching unit, Link
Santec Corporation, manufacturer of high speed swept laser for medical
applications, MEMS scanner Link
MEMSCAP Link
Boston Micromachines Corporation, deformable mirrors Link
Wavien, low cost pocket projector
Lemoptix, LSCAN micromirror device Link
Optilux liquid lens for smart phones and tablets Link
related:smart contact lens
MicroVision, portable display device maker (Nasdaq:MVIS). Link
Boston Micromachines, Adaptive optics, deformable mirrors. Link
IMEC, Belgium, a company that focuses on nanoelectronics, including micro mirror
arrays Link
Fujifilm Dimatix, maker of large format ink jet
printing Company link
3/25/2011
Eastman Kodak 3/25/2011
poLight AS, reflowable autofocus actuated lenses for
camera phones, TLens, series B funding $18.5M in July 2011 Link
Tessera Siimple MEMS autofocus lens Link 2Q
revenue $70M Tessera is traded on Nasdaq
under TERA.(TSRA)
Chsistie, maker of 3D cinema projector Link
Vuzix, video eyewear maker, Rochester, NY, Link
Panorama Synergy, Magneto-optics devices, Link
Kaiam, MEMS optics integration technology, Link
Communications and electronics space
- RF switch, discrete tunable elements, resonators, filters, acoustic wave
resonators
Avago Technologies, Link,
Acoustic FBAR (film bulk acoustic resonator) filters (shipment news 1
2),
analysis acquired
Infineon AG's BAW business in 2008.
Agilent, FBAR filter and duplexer News
WiSpry, developer of MEMS RF capacitors, tunable filters, duplexers, and
RF switches Link
Analysis
XCOM Wiress MEMS relays Link
Dust Networks (smart dust sensors) Company History
SiTimes resonator Company
3/25/2011 ships
50Millionth unit around June 2011
Discera (resonator) Company
Shinsegi Communications Systems (oscillator) Korea, Company
Siward, Taiwan, MEMS quartz oscillator
Silicon Laboratories (Nasdaq: SLAB), which acquired Silicon Clocks and
SpectraLinear, both in timing
solution Company EE
Time Article Jan/2011*
Sand9, precision timing products for wireless applications Link raised
$3.1M in Nov 2011
Ecliptek, founded in 1987, oscillators Link
Cavendish Kinetics, a fabless semiconductor manufacturer in RF tuning products Link
RF Micro Devices, cellular RF components, Link
Wireless modules:
Mccdaq, MC Measurement and Computing, Link
Companies in the
energy and materials space
MicroGen Systems LLC, energy harvestors link
mPhase technologies, nanobattery technology, link
MicroPelt, thin film cooler technology, Link
Small companies/relatively new start-ups/Products covering emerging markets (private held companies)
MEMScube
Senodia, Chinese maker of gyro Link Collaborating
with X-Fab on a variety of projects
Fluidigm, developer of microfluid platforms Link
Veeco MEMS Probes Link
Nanoink MEMS Probes
Other companies in the scanning probe space K-Tek
(Korea), Micro2Nano.com
Formfactor (Nasdaq:FORM), making of probe cards Link Q32011
revenue=$52M, net profit $6-9M. (reference: Microprobe)
MEMjet, maker of large format ink printing head Link
MOVEA SA, maker of motion sensing applications, including the Gyration
mouse and airmouse app Link Company
News Link
Hillcrest Labs, Motion sensing remote, software, Link
NovAtel, SPAN GNSS/Inertial Systems, Link
InterSense, motion sensing technology, Link
Global Navigation Satellite Systems, GNSS
XSens, motion tracking, Link
Baolab, Spain, NanoEMS platform, motion sensing, magnetic sensing,
packaging, Link
Audio Pixels (AKP:ASX), Australia, MEMS digital speakers, collaboration
with SONY and others Link
Bluechiip Limited (ASX ticker: BCT), a company specializing in wireless tracking
solutions that monitors temperature of objects Link
Melexis NV (MELE: Euronext), Belgium, a company specializing in microelectronics
integrated sensors such as pressure sensors, claiming to help cars become
greener Link Wikipedia
Telecardia, MEMS based pH sensors Link
BlockMEMS, a Mass company affiliated with Block
Engineering. Link
to news
MicroSense LLC, high resolution capacitive position sensors, Link
Applied Research
Institutions
CEA LETI (France) Link
Alchimer, provider of advanced deposition technology Link
A*STAR IME (Institute of Microelectronics, Agency for Science, Technology and
Research) Link Singapore
ASTAR
ITRI, Taiwan (Industrial Technology Research Institute), Link
Microelectronics Innovation Collaboration Center (C2MI), Quebec, Canada, Link
Collaboration Innovation Center, Carnegie Mellon University Link
Fraunhofer IPMS, a custom research institute for microelectronics and MEMS Link
Circuit/component Players
Maxim Integrated Products, analog and mixed signal IC Link
Cypress, Link touch
sensor
EPCOS AG, a German maker of electronics components, including MEMS barometric
pressure sensor Link Wikipedia
Altera, developer of packaging solutions for circuits Link
MEMS
Consultants
A.M. Fitzgerald, Link
Nanoshift, Link
SystemPlus consulting, France, MEMS cost consulting, Link
Plasma-therm Link
Applied Materials , Link
MEMS division
KLA-Tencor, Link
EV Group (EVG), headquartered in Austria, founded in 1980. Specializes in
double side alignment products and specialties wafers and processes. Link
Oxford Instruments, Link
Xactix (XeF2 etcher), Link
Primaxx (dry etch release) Link
Tegal, Japan an innovator of specialized production equipment including DRIE,
Tegal ProNova, etc (maker of DRIE equipment) Link Link
Finetech (bonding, assembly) Link
SUSS MicroTec AG, founded as Karl Suss in 1949, headquartered in Munich
Germany, coater, 3D integration, bonding, nanoimprint Link
Sumitomo Precision Products, SPP, maker of etching, deposition, thermal
processing equipment, Link
EV Group, headquartered in Austria, with presence in US and Asia,
lithography, bonding, advanced packaging,
Link
Brewer Science, bonding, wafer handling, lithography tools,
anti-reflection, etc Link
MEMSStar, UK, special equipment including surface treatment and zenon
difluoride etching Link $20M order
in 2010
Tousimis, Supercritical carbon dioxide dryer maker Link
Xaxtix, Zenon difluoride etcher maker Link
Lumera Laser for pico second laser processing Link
E M Optomechanical, EMOpto, maker of 3D MEMS profiler Link
SPP Process Technology Systems (SPTS), a supplier of capital equipment and
process technology, maker of APS etch system Link
Omega APS
etch system
OAI, semiconductor lithography instruments link
Sonoscan, acoustic imaging, wafer bonding inspection. Link
Advanced Diamond Technologies, diamond film deposition, UNCD diamond, Link
Rasco GmbH, testing equipment, a Cohu Inc. (Nasdaq: COHU) Link
Multitest, a maker of test equipment, part of Dover, Link
Moritex, machine vision and digital imaging products, link
CMSF, Plures Technologies, Owner of Advanced MicroSensros Corp, magnetic sensor
fab, Shrewsbury, MA Link
Resonetics LLC, excimer laser MEMS processing tool, Link
Surfx Technologies,
atmospherical plasma technology, acquired by Precision Mechatronics in Nov
2011
3D Systems Corporation (NYSE:DDD)
acquires Huntsman Corporation (NYSE:HUN)'s
Digitalis resin MEMS platform for $41M, Nov 2011
Micronit MEMS division, design, prototyping and manufacturing of MEMS on
glass Link
Scannano, Deep vacuum gap (DVG) technology Link
Schott,
maker of thin glass wafer MEMpax
Heidelberg Instruments, maker of table top lithography systems Link
4Wave, ion beam sputtering system, Link
PVA TePla, system engineering company in hard-metal sintering, plasma
processing, and crystal growing. Link
Solid State Equipment LLC, single wafer wet processing and cleaning, Link
USHIO, Japanese maker of optical systems, including steppers. Link
The first ten below are listed top ten by MEMS Investor Journal, Oct 14, 2010 Link PDF Backup
Pure play MEMS foundries (MEMS only)
IMT, Innovative Micro Technology (Santa Barbara), largest pure play MEMS foundry, through wafer via
technology Link
Asia-Pac Microsystems (APM) Hsinchu, Taiwan, Link
Tyledyne Dalsa (Canada, near Montreal) Link
(Teledyne acquired Dalsa for
canadian dollar 341 million around Dec 22, 2010)
Micralyne (Canada, near Edmonton) Link
Success stories
Silex Microsystems (Sweden, Boston, San Francisco) Link
Unique
Technology
Colibrys, Switzerland and North America, manufacturer of motion sensors, and
provider of foundry services Link Foundry
MEMSCAP (formerly Microelectronics Center of North Carolina, MCNC) Link
XFab mixed-signal foundry experts, Germany, Texas and Malaysia Link
Tronics, Grenoble, Dallas, Link
Touch Micro (founded 2004) Taoyuan, Taiwan, Link
Advanced MicroSensors, owned by Plures and CMSF. Strewsbury, MA.
Specializing in magnetoresistive sensors. Link
Honeywell foundry Link
Omron Foundry Link
SONY Foundry Services, foundry customers include Knowles Electronics, $31M
in 2011 Link
Mixed mode foundry 2011
outlook
ST Microelectronics, foundry
with $228 revenue in 2010 for HP joint
lab opened with China's Harbin Inst. of Tech in 2012
GlobalFoundries, Link
TI foundry, one of the largest through joint collaborative efforts,
customers include Lexmark, spin off from a former IBM ink jet division.
MEMS Tech, Malaysia and Singapore, Link
SVTC (development and commercialization services), Silicon Valley, Austin, Texas
Link
Texas Microfactory (Pilot scale production) Link
Sensoror, Norway, $38M for 2011
Semefab, a new player, Link
Tronics Group, MEMS foundary operating facilities in Grenoble, Dallas,
Japan, Beijing Link
Primary IC Manufacturing Foundries
TSMC, taiwanese foundry specializing in electronics, enabling and leading the fabless
semiconductor movement, founded 1987 by Morris Chang and ITRI, Link
Wikipedia
Hua Hong NEC, Shanghai, China, founded 1997 , Link
Grace Semiconductor Manufacturing, 宏力, Shanghai, China, formed in
2000, Link
UMC, 聯電,
Hsingchu, Taiway, Link CMOS-MEMS
process
Advanced Semiconductor Manufacturing Corporation, Shanghai, Link
Semiconductor Manufacturing International, 中芯,
China, SMIC, formed April 2000, Link
Siware Systems, fabless semiconductor company focusing on custom ASIC and MEMS
Link
Asahi Kasei Microdevices (AKM), Tokyo, Japan, and San Jose, CA Link
Component vendors: Newark electronics Link
Digi-Key Link
Robot Simple, a neat site that sells parts for building robots toys, including
MEMS parts Link
Projectors and TVs (InFocus, )
E-readers: Amazon Kindle, Barnes and Noble Nook
Gaming machines: Nintendo Wii
Consumer electronics: Apple iPod
VectorNav, (Dallas, TX, founded 2008) GPA aided inertial navigation systems on
chip Link
Spirent, indoor positioning hybrid sensor fusion (see also Omron) Link
Nike FuelBand,
high end pedometer that use MEMS to count steps and color to provide feedback
XSens motion tracking | X2Impact,
helmet mount brain injury detector | Lifecomm
LLC, watch for fall detection
Runtastic Gmbh, smart phone apps for
tracking exercise status | Tanita
Corp, activity monitors | Polar
Electro, activity monitors
BodyMedia, body tracking
| Motorola Mobilities, MotoACTV
Transducer Research Foundations
MANCEF: Micro and Nanotechnology Commercialization Education Foundation Link
MEMS Industry Group Link
MEPTEC: Microelectronics Packaging and Test Engineering Council Link
IEEE: Institute of Electrical and Electronics Engineers
ASME: American Society of Mechanical Engineers
CINN,Chinese International NEMS Network, Link
CSMNT: Chinese Society of Micro and Nanotechnology Link
MEMS.net Link MEMS user community
containing information about the field and various tools and applications
SEMI, the global industry association serving the manufacturing supply chain for
the micro- and nanoelectronics industries. Link
VDI/VDE Innocvation, a German organization, Link
Minalogic, a Grenoble, France company with many projects and clusters. Link
Kic, a free graphic editor for MEMS layout
L-Edit, by Tanner Research, for circuit design
SoftMEMS
Coventor, maker of CoverntorWare
Synopsys, silicon multi die design tool, Link
Noteworthy link to technical notes
Packaging of three axis accelerometers Link
Venture capital funding of semiconductor industry Link
Where are MEMS found, a list of MEMS devices used in various industry sectors Link
* If a company derives over 70% of revenue from one product, the company will listed in one category. If a company has two or three products that are roughly equal in revenue, the companies will be listed across two categories. If a company has more categories but none of the product is larger than 70%, the company will be listed under "large company or companies with multiple products".