This is a dedicated companion website for the Foundations of MEMS textbook. This site is dedicated to students, instructors, MEMS technologists, and the general public, providing supporting materials for anyone using the book Foundations of MEMS. The broader objective of this website is to provide educational resources and materials for a broader and deeper understanding of the MEMS technology by students, specialists, and the general public. 

The second edition was published on February 28, 2011.  Link to second edition changes and table of contents. Visit MEMS Links page, the most complete and up-to-date list of MEMS related companies on the web.

Updates:                
Dec 1, 2010, Added MEMS Motion Sensor Perspectives A chronicle case study of the technology and business of MEMS motion sensors - accelerometers and gyros
Dec 6, 2011, Updated a story The MEMS Microphone Patent Saga, a chronicle account and analysis of events related to patent law suits among leader MEMS microphone companies.
January 14, 2011, Added Graphic History of MEMS. This is a summary of key events in the history of mems, both in academia and industry. (Instructor resources section)
February 7, 2011, Added simplified tables summarizing common encountered MEMS materials, common process steps, and a reaction table between such materials and processes.
February 12, 2011, Added discussion about the three pillars of MEMS: design, materials, and processing techniques.
April 17, 2011, Updated Dynamics for MEMS in a nutshell This is a very comprehensive and thorough review of second order system dynamics.
November 10, 2011, added Blog and discussion forums.  (Click 3rd button on left).  Please visit, or better yet, sign in, join, and participate.
December 1, 2011, added a new review article MEMS Market Trends (pdf version), a review of MEMS market trends and current status. 
December 23, 2011, added a new review artitle The Solyndra Saga, a detailed examination of technology, manufacturing, business and politics of the failed Solyndra solar panel company.
September 11, 2013, link added to practice solved problems in MEMS, courtesy of miraed.net.

December 10, 2014, Knowles vs. GOER Tek MEMS Microphone legal suit case summary

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Students will find the following information useful, in the Student Resources section:
- MEMS related videos and instructions;
- Example problems and solved problems;
- Links and MEMS related news.

Instructors will find the following information useful in the Instructor Resources section:
- Supplemental Chapters;
- Supplemental homework assignment problems;
- Examples and solved problems;
- Ideas for class projects:

All visitors would find the following information useful:
- MEMS related news and links;
- Collected informational video clips, useful for reference or teaching;
- Links to useful information;
- MEMS history and perspectives.