Updates:
Dec 1, 2010, Added MEMS Motion Sensor Perspectives
A chronicle case study of the technology and business of MEMS motion sensors -
accelerometers and gyros
Dec 6, 2011, Updated a story The
MEMS Microphone Patent Saga, a chronicle account and analysis of events
related to patent law suits among leader MEMS microphone companies.
January 14, 2011, Added Graphic History of MEMS.
This is a summary of key events in the history of mems, both in academia and
industry. (Instructor resources section)
February 7, 2011, Added simplified tables summarizing common
encountered MEMS materials, common
process steps, and a
reaction table between such materials and processes.
February 12, 2011, Added discussion about the
three pillars of MEMS: design, materials, and processing techniques.
April 17, 2011, Updated Dynamics
for MEMS in a nutshell This is a very comprehensive and thorough review
of second order system dynamics.
November 10, 2011, added Blog and
discussion forums. (Click 3rd button on left). Please visit, or better yet, sign in, join, and
participate.
December 1, 2011, added a new review article MEMS
Market Trends (pdf
version), a review of MEMS market trends and current
status.
December 23, 2011, added a new review artitle The
Solyndra Saga, a detailed examination of technology, manufacturing, business and politics of
the failed Solyndra solar panel company.
