This is a dedicated companion website for the Foundations of MEMS
textbook. This site is dedicated to students, instructors, MEMS
technologists, and the general public, providing supporting materials for anyone
using the book Foundations of MEMS. The broader objective of this website is to
provide educational resources and materials for a broader and deeper
understanding of the MEMS technology by students, specialists, and the general
The second edition was published on February 28,
2011. Link to second
edition changes and table of contents.
Dec 1, 2010, Added MEMS Motion Sensor Perspectives
A chronicle case study of the technology and business of MEMS motion sensors -
accelerometers and gyros
Dec 6, 2011, Updated a story The
MEMS Microphone Patent Saga, a chronicle account and analysis of events
related to patent law suits among leader MEMS microphone companies.
January 14, 2011, Added Graphic History of MEMS.
This is a summary of key events in the history of mems, both in academia and
industry. (Instructor resources section)
February 7, 2011, Added simplified tables summarizing common
encountered MEMS materials, common
process steps, and a
reaction table between such materials and processes.
February 12, 2011, Added discussion about the
three pillars of MEMS: design, materials, and processing techniques.
April 17, 2011, Updated Dynamics
for MEMS in a nutshell This is a very comprehensive and thorough review
of second order system dynamics.
November 10, 2011, added Blog and
discussion forums. (Click 3rd button on left). Please visit, or better yet, sign in, join, and
December 1, 2011, added a new review article MEMS
Market Trends (pdf
version), a review of MEMS market trends and current
December 23, 2011, added a new review artitle The
Solyndra Saga, a detailed examination of technology, manufacturing, business and politics of
the failed Solyndra solar panel company.
you like the original contents, please click
here to submit your email address to subscribe to updates of contents and
Students will find the following information
useful, in the Student Resources section:
- MEMS related videos and instructions;
- Example problems and solved problems;
- Links and MEMS related news.
Instructors will find the following information
useful in the Instructor Resources section:
- Supplemental Chapters;
- Supplemental homework assignment problems;
- Examples and solved problems;
- Ideas for class projects:
All visitors would find the following information
- MEMS related news and links;
- Collected informational video clips, useful for
reference or teaching;
- Links to useful information;
- MEMS history and perspectives.